PARTICLE COUNT TESTS(AT REST)
PARTICLE COUNT TESTS(AT
REST)
Objective:
This test is
undertaken to verify that the system can provide the required airborne
particulate cleanliness classification as defined in the design specification
in the “at rest” condition.
Acceptance Criteria:
The particle
counts should not exceed the airborne particulate cleanliness classification
identified within EN ISO 14644, clean rooms & Associated Controlled
Environments, part 1, Classification of Air Cleanliness.(Class 8).
Class limits
in particles of size equal to, or greater than, 0.5µm and 5.0µm are shown below:-
Classification
ISO 14644
|
Allowable number of “At Rest”
particles per cubic meter at 0.5 µm
|
Allowable number of “At Rest”
particles per cubic meter at 5.0 µm
|
ISO Class 8
(At Rest)
|
3,520,000
|
29,300
|
Test Equipment:
Calibrated
light scattering particle counter.
These tests
can only be carried out after a complete clean of facility has occurred.
The test
methodology, including the calculation of sample locations and volumes, is
based upon ISO 14644:1999 Clean rooms & Associated Controlled Environments,
Part 1, Classification of Air Cleanliness.
Calculating
the Number of Sample Locations:
The number
of test locations should be calculated using the formula given below. The
number of locations may be seen in the table provided whilst the count
locations within each room should be shown on a drawing as an appendix-2.
Number of locations NL=√A(Square Root of A, Where
NL=Minimum number of sampling
locations(rounded up to a whole number)
A=Area of the clean room or Clean zone
is square meters.
The number of location shall be
rounded off to the nearest whole number.
Ensure that the sampling locations are
evenly distributed throughout the area of clean room and positioned at the
height of the work activity.
Calculating the Sample Volume:
The minimum sample volume per location
is 2 litres.
The minimum sample time at each
location must be one minute or greater.
There
is no definition of the number of samples to be taken at each sample
point except in the case when there is only one sample point. For one sample
point, there must be at least three sample volumes taken.
If the number of sample locations is
at leas two but not more than nine, then the Upper Confidence Limit(UCL) will
also be calculated, and the calculated value for the UCL must also be less than
the classification limit.
If the number of sample locations is greater
than 10 and more than one sample was collected per location, then the
classification is determined by the averages of the particle counts obtained at
each location. The calculated average at each location must pass the
classification limit.
If the particle counter is set-up to
operate at a flow rate of 1ft³ per minute, then the particle count value will
need to be multiplied by 35.31 to convert particles per ft³ to particles per m³.
Performing the Practical Work:
The methodology should be undertaken
in accordance with EN ISO 14644:1999, Part 1.
Configure the particle counter to
calculate the 95% Upper Confidence Limit value derived from the particle
counts, for particle sizes of 0.5µm and 5.0µm.
Record the 95% UCL values within the
result table, identifying any non-conformances.
Append all raw data and calculation
sheets.(The print out of the particle count shall ne checked and the same shall
be duly signed and filed along with a photocopy).
Number of test positions and samples:
Room No
|
Room Description
|
Floor Area(m²)
|
No. fo Test positions
|
No. of Test Samples per location
|
|
|
|
|
|
Duration:
Carry out
the airborne particle count for three consecutive days.
Acceptance
criteria:
Particles count.
|
(At rest(Per m³)
|
In Operation(Per m³)
|
||
≥0.5µ
|
≥5µ
|
≥0.5µ
|
≥5µ
|
|
Class C
|
352,000
|
2900
|
35,20,000
|
29000
|
Class D
|
35,20,000
|
29000
|
Not defined
|
Not defined
|
The clean
room or clean zone is deemed to have met the specified sir cleanliness
classification if the averages of the particle concentrations measured at each
of the locations and, when applicable, the 95% upper confidence limit, do not
exceed the concentration limits(for 0.5 and 5.0 micron) given in the above said
Table.
AREA
CLEANLINESS CLASSIFICATION
Sr.
No
|
Std EC Grade
|
Particles/M³
|
|||||
≥5µ
|
≤0.5 µ
|
||||||
1.
|
Grade A
|
At Rest
|
20
|
3,520
|
|||
|
In Operation
|
20
|
3,520
|
||||
2.
|
Grade B
|
At Rest
|
29
|
3,520
|
|||
In Operation
|
2,900
|
3,52,000
|
|||||
3.
|
Grade C
|
At Rest
|
2,900
|
3,52,000
|
|||
In Operation
|
29,000
|
3,520,000
|
|||||
4.
|
Grade D
|
At Rest
|
29,000
|
3,520,000
|
|||
In Operation
|
Not defined
|
||||||
Sr.
No
|
WHO
|
Particles/M³
|
|||||
≥5µ
|
≤0.5 µ
|
||||||
5.
|
Grade A
|
At Rest
|
0
|
3,500
|
|||
|
|
In Operation
|
0
|
3,500
|
|||
6.
|
Grade B
|
At Rest
|
0
|
3,500
|
|||
|
|
In Operation
|
2,000
|
3,50,000
|
|||
7.
|
Grade C
|
At Rest
|
2,000
|
3,50,000
|
|||
|
|
In Operation
|
20,000
|
35,00,000
|
|||
8.
|
Grade D
|
At Rest
|
20,000
|
35,00,000
|
|||
|
|
In Operation
|
Not defined
|
Not defined
|
|||
|
ISO
Classification Number
|
Particles/M³
|
|
≥5µ
|
≤0.5 µ
|
|
ISO Class 5
|
29
|
3,520
|
ISO Class 7
|
2,930
|
3,52,000
|
ISO Class 8
|
29,300
|
3,520,000
|
ISO Class 9
|
2,93,000
|
35,200,000
|
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